1.Accountable Integrated loop owner for learning vehicle pilot and process setup
2.Establish In_line monitor system to address the healthy of the specific integrated process (CD/AA/TK,eBeam,Defect..).
3.Establish WAT monitor system to address the healty of the specific integrated process
4.Setup the learning vehicle Integrated process setup and pilot
Process setup documentation
1.Accountable Integrated loop owner for learning vehicle pilot and process setup
2.Establish In_line monitor system to address the healthy of the specific integrated process (CD/AA/TK,eBeam,Defect..).
3.Establish WAT monitor system to address the healty of the specific integrated process
4.Setup the learning vehicle Integrated process setup and pilot
Process setup documentation